Spherical Submicron-size Copper and Copper-tungsten Powders Prepared in RF Induction Thermal Plasma
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چکیده
منابع مشابه
An rf sustained argon and copper plasma for ionized physical vapor deposition of copper
Langmuir probe, optical emission spectroscopy, and biased quartz crystal microbalance measurements were used to investigate an argon and copper plasma used for ionized physical vapor deposition of copper. Copper vapor generated by a magnetron sputter discharge is ionized upon passing through an argon discharge excited by an internal rf induction antenna. Argon plasma characteristics such as ele...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Powder and Powder Metallurgy
سال: 2007
ISSN: 0532-8799,1880-9014
DOI: 10.2497/jjspm.54.39